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Wednesday, September 16, 2026

Huawei orchestrating state-backed Chinese startups and optics makers to build a domestic DUV scanner

 


Instead of acting purely as a chip designer or smartphone vendor, Huawei has transformed into the de facto system integrator and general contractor for China’s entire national lithography push.

Recognizing that no single Chinese startup or state enterprise could rival ASML's multi-decade integration with Zeiss and Cymer, Huawei stepped in to coordinate, fund, and test a decentralized network of domestic specialized firms.

1. The Shadow Equipment Arm: SiCarrier & Yuliangsheng (U-Precision)

Because direct Huawei branding on equipment triggers swift US export sanctions, Huawei operates through closely aligned corporate proxies and state-backed entities:

  • SiCarrier Ecosystem: Formed with backing from the Shenzhen municipal government and staffed heavily by former Huawei precision-engineering veterans, SiCarrier serves as Huawei’s primary equipment vehicle.

  • Yuliangsheng (U-Precision): Established in Shanghai’s Pudong district, this startup co-developed China’s first advanced domestic Deep Ultraviolet (DUV) immersion scanner. Yuliangsheng acts as the physical assembly point where optics, light sources, and stages meet.

  • Reorganizing SMEE: State bodies—such as the Shanghai IC R&D Center—have integrated resources across SMEE (China's legacy lithography champion) and Yuliangsheng. SMEE acts as the foundational IP holder, while Yuliangsheng focuses on high-speed prototyping and pilot line execution.

2. Supply Chain Orchestration via Hubble CVC

Through its venture capital arm, Hubble Technology Investment, and allied funds (like Shenzhen Yuanzhi Xinghuo), Huawei systematically injects capital into single-node bottlenecks to build domestic alternatives to Zeiss, Cymer, and VDL:

                       ┌───────────────────────────────────────┐
                       │          HUAWEI / HUBBLE CVC          │
                       │   (Capital, IP & Systems Integration)  │
                       └──────────────────┬────────────────────┘
                                          │
       ┌──────────────────────────────────┼──────────────────────────────────┐
       │                                  │                                  │
┌──────▼─────────────────┐     ┌──────────▼───────────────┐     ┌────────────▼─────────────┐
│  LIGHT SOURCE (Cymer)  │     │   OPTICS COLUMN (Zeiss)  │     │    SCANNER ASSEMBLY      │
├────────────────────────┤     ├──────────────────────────┤     ├──────────────────────────┤
│ Beijing RS Laser       │     │ Fujian Zichi Photonics   │     │ Yuliangsheng / SMEE      │
│ (High-power 193nm ArF  │     │ (Ultra-precision mirrors │     │ (System integration &    │
│  immersion lasers)     │     │  & optical elements)     │     │  interferometer stages)  │
└────────────────────────┘     └──────────────────────────┘     └────────────────────────┘
  • Light Sources (RS Laser): Hubble backed Beijing RS Laser Optoelectronics to accelerate development of 193nm Argon Fluoride (ArF) excimer light sources. RS Laser supplies the high-pulse-frequency laser engines needed for domestic immersion prototypes.

  • Optics & Crystals (Zichi Photonics): Huawei channeled funding into Fujian Zichi Photonics (a spin-off from CasTech) to develop high-purity synthetic optics, waveplates, and mirror assemblies capable of handling DUV laser energy without thermal distortion.

  • Metrology & Motion: Huawei collaborated with academic institutions (such as Harbin Institute of Technology) and specialized startups to engineer high-precision laser interferometers capable of controlling wafer stages down to sub-nanometer steps.

3. The "Foundry-As-A-Testbed" Model (Bridging Prototype to Production)

Historically, the biggest obstacle for domestic Chinese toolmakers was that foundries like SMIC refused to run unproven Chinese prototypes on real commercial lines—doing so risked millions in wasted silicon and fab downtime.

Huawei broke this stalemate by using its leverage as China’s premier tech champion:

  1. Guaranteed Offtake: Huawei guarantees purchase contracts for finished chips, de-risking the financial loss for foundries testing domestic equipment.

  2. In-House Pilot Lines: Huawei established its own secret fab facilities and pilot testing lines (including lines in Shenzhen and Shanghai) to test Yuliangsheng/SMEE DUV prototypes before bringing them to SMIC or CXMT.

  3. Co-Engineering Tool Iteration: Instead of waiting for a toolmaker to ship a finished product, Huawei engineers sit inside the equipment fabs, iteratively optimizing software drivers, real-time feedback loops, and multi-patterning alignment algorithms.

Current Status and Targets

By acting as the central hub, Huawei has forced a fragmented industry to operate like a unified corporate entity.

  • Production Pilot Milestones: Prototypes co-developed by Yuliangsheng and SMEE are running trials at SMIC, Hua Hong, and CXMT, with initial delivery roadmaps targeting ~5 to 12 low-yield immersion DUV units annually.

  • Remaining Dependence: Despite this orchestration, early prototypes still rely on secondary-market or stockpiled foreign optics (e.g., Zeiss components) for peak performance while domestic drop-in replacements mature.

Huawei's orchestrator model proves that while China cannot buy ASML's vertical integration, it can attempt to rebuild it through state-guided corporate coordination.

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